Particle Inspection

KLA-Tencor Surfscan 6420 Particle Inspection System

KLA-Tencor Surfscan 6420 Particle Inspection System

ManufacturerKLA-Tencor
OEM Part #Surfscan 6420
Description

Up to 8"/200mm Wafer Capable! 

 

ID #5090
ConditionUsed

KLA-Tencor Surfscan 6420 Particle Inspection System

ManufacturerKLA-Tencor
OEM Part #Surfscan 6420
Description

Up to 8"/200mm Wafer Capable! 

 

ID #5068
ConditionUsed

KLA-Tencor Surfscan SP1 DLS Unpatterned Surface Inspection System

ManufacturerKLA-Tencor
OEM Part #SP1 DLS
Description

Configured for 200/300mm Wafers

 

ID #5069
Condition

KLA Tencor Surfscan 6200 Particle Inspection System

ManufacturerKLA-Tencor
OEM Part #Surfscan 6200
Description

200mm Wafers, Tested, Functional

ID #5057
ConditionTested

Takano WM-10R Surface Particle Inspection System

ManufacturerTakano
OEM Part #WM-10R
Description

2"-12" Wafer Capable, Multiple Software Options, Brand New Tool!

ID #4974
ConditionNew

*NEW* Takano WM-7SR Surface Particle Inspection System

ManufacturerTakano
OEM Part #WM-7SR
Description
ID #4617
ConditionNew

KLA-Tencor Surfscan 5500 Inspection System

ManufacturerKLA-Tencor
OEM Part #Surfscan 5500
Description

Up to 200mm capable! 

ID #4568
ConditionUsed

KLA-Tencor SP1 TBI Unpatterned Surface Inspection System

ManufacturerKLA-Tencor
OEM Part #SP1 TBI
Description

200mm/300mm, Puck/Vacuum, Open Cassette or FIM/FOUP Handler

 

ID #4517
ConditionRefurbished

KLA-Tencor Surfscan 6400 Particle Inspection System

ManufacturerKLA-Tencor
OEM Part #
Description

Up to 8"/200mm Wafer Capable! 

ID #4467
ConditionUsed

KLA-Tencor Surfscan 6220 Particle Inspection System

ManufacturerKLA-Tencor
OEM Part #Surfscan 6220
Description

8"/200mm Wafer Capable! 

 

ID #4362
ConditionUsed